Figure 1. Thermogenerator: (a) view from the structured side, (b) view through the transparent BSG-substrate.

Published 07/15/2025 at 493 × 679 in Micromachined Thermogenerator Directly Integrated into Metal Parts Technological Aspects of the Embedding Process

Figure 1. Thermogenerator: (a) view from the structured side, (b) view through the transparent BSG-substrate.

Figure 1. Thermogenerator: (a) view from the structured
side, (b) view through the transparent BSG-substrate.

Figure 1. Thermogenerator: (a) view from the structured
side, (b) view through the transparent BSG-substrate.